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Electrostatically actuated nanotubes and nanowires have many promisingapplications as nano-switches, ultra sensitive sensors and signal processingelements. These devices can be modelled as slender beams with circularcross-section. In this paper, effects of residual stress on static and dynamiccharacteristics of a cylindrical nanobeam are presented. Galerkin basedmulti-modal reduced order model technique has been used to solve the governingdifferential equation. The equation has also been solved numerically bycollocation method for verification of the results. The effects of higher modesin reduced order modelling have been investigated. The analysis shows that theresidual stress significantly influence the static and dynamic characteristicsof the nanobeam. In particular, the results show that resonating frequencytunability increases significantly under the presence of compressive residualstress. In addition, an inherent resonating frequency stability mechanism undertemperature variation in nanobeam resonators has also been explored.

Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam