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We have carried out systematic Macroscopic Quantum Tunneling (MQT)experiments on Nb/Al-AlO_x/Nb Josephson junctions (JJs) of different areas.Employing on-chip lumped element inductors, we have decoupled the JJs fromtheir environmental line impedances at the frequencies relevant for MQT. Thisallowed us to study the crossover from the thermal to the quantum regime in thelow damping limit. A clear reduction of the crossover temperature withincreasing JJ size is observed and found to be in excellent agreement withtheory. All junctions were realized on the same chip and were thoroughlycharacterized before the quantum measurements.

Dependence of the Macroscopic Quantum Tunneling Rate on Josephson Junction Area