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We report our detailed investigation of high-resolution imaging usingsecondary electrons (SE) with a subnanometer probe in an aberration-correctedtransmission electron microscope, Hitachi HD2700C. This instrument also allowsus to acquire the corresponding annular-dark-field (ADF) images simultaneouslyand separately. We demonstrate that atomic SE imaging is achievable for a widerange of elements, from uranium to carbon. Using the ADF images as a reference,we study the SE image intensity and contrast as a function of applied bias,atomic number, crystal tilt and thickness to shed light on the origin of theunexpected ultrahigh resolution in SE imaging. We have also demonstrated thatthe SE signal is sensitive to the terminating species at a crystal surface.Possible mechanisms for atomicscale SE imaging are proposed. The ability toimage both the surface and bulk of a sample at atomic scale is unprecedented,and could revolutionize the field of electron microscopy and imaging.

Atomic Imaging Using Secondary Electrons in a Scanning Transmission Electron Microscope : Experimental Observations and Possible Mechanisms