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Manufacturing variation in the micro fabrication process inevitably altersthe size of the designed structure and thereafter influences the performance ofdevices to some extent. A good knowledge of this effect will help the designand optimization of the devices. In this letter, we propose an analytical modelto investigate the effect of manufacturing variation on the individualresonator in a chain of coupled micro mechanical resonators. The model is alsoused in a reverse manner to estimate the possible range of manufacturingvariation based on the designed value and the measured frequency response.

Analysis of the manufacturing variation in a coupled micro resonators array based on its designed value and measured eigenfrequencies