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We developed superconducting nanowire single-photon detectors with an opticalcavity (OC-SNSPDs) for multichannel systems. For efficient coupling, thedevices were installed in compact fiber-coupled packages after their substratethickness was reduced from 400 to 45 $\mu$m. The measured detection efficiency(DE) measurement at different substrate thicknesses and the estimation ofoptical coupling efficiency indicated that ~98% of the input light beam couldbe radiated on a 15x15 $\mu m^2$ nanowire area from behind the substrate. TheDEs of a NbN OC-SNSPD system were observed to be 9.5% and 25% at 1550 nm and1310 nm, respectively (dark-count rate: 100 c/s).

Compactly packaged superconducting nanowire single-photon detector with an optical cavity for multichannel system