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Tungsten trioxide thin films were deposited on glass substrates by microprocessor controlled spray pyrolysis method. The characterization and gas sensitivity of WO3 thin film sensor were investigated. The WO3 thin films were observed to be sensitive for NH3 vapor at different concentrations (5-200ppm) at room temperature. The maximum sensitivity for NH3 vapor by WO3 sensor was found at 200ppm concentration. The response (~ 50s) and recovery (~30s) were the main features of these sensors. The high sensitivity, quick response and fast recovery indicated that WO3 thin film sensors are selective for NH3 vapor when compared with ethanol, acetone and toluene vapors.

Room Temperature NH3 – Sensing Properties of WO3 thin films Synthesized by Microprocessor Controlled Spray Pyrolysis