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The work on the paper has been emphasized on modelling fabrication process flow of MOS based gas sensor .Different layered with material and thickness have been structured to obtain the required characteristic of gas sensor .By using piezoresistive material on fabrication layer where micro hotplate are used, the gas sensor behave as MEMS based piezoresistive gas sensor. The cavity has made on the surface to get desired response of change a level of gas concentration with pressure for detection of various hydrocarbons gases, material of fabrication layer has been used accordingly. For all this purpose the Devedit (silvaco tool)has been used.

Modeling the Fabrication Process Flow of MOS Gas Sensor based on Surface Micro-machining Technology