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singhania university Abstract: This paper studies a resonant silicon sensor whose elementary sensing component is the E-type round diaphragm, and the final sensing component is the silicon beam resonator is attached to the E-type round diaphragm. the relationship between the basic natural frequency of the beam resonator and the measured acceleration are calculated and simulated by using the above finite element modeling in detail. Because of the fact that beam is located on the different position on the E-type round diaphragm and the length of the beam, the outer radius of the E-type round diaphragm are varied respectively. The related analyses and investigations are carried out. Some important results on the relationship between the basic natural frequency of the beam resonator and the measured acceleration are obtained. Finally, based on the differential output scheme of the resonant sensor and some related criteria, a set of appropriate parameters for the above sensing structure of the

Simulation of the different position on the E-type round diaphragm and the length of the beam,