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Young's moduli of thin SiO2 films are measured by using micromachined Cantilevers. They are fablicated in a silicon chip in various lengths so that they have different resonant frequencies. The lever is vibrated by a electrodynamic vibrator, and the amplitude of the lever is measured by a laser interferometer. The micromachined cantilever itself acts as a half mirror, while the etch pit of the silicon chip works as a fixed mirror to construct a Fizeau interferometer in the micro test structure, resulting in a simple measurement system. The Young's moduli of SiO2 thin films are estimated from vibration experiments in the presence of air viscocity, and they are compared that of the bulk value.

A Young's Modulus Estimation of Silicon Dioxide Thin Films by Means of Vibration Measurement of Micromachined Cantilevers