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Electrode impedances are measured to quantitatively characterize the electrode-electrolyte or cell-elec-trode interfaces. In the case of high-density microelectrode arrays(MEAs) that have been developed for brain-machine interface applications, the characterization process becomes a repeating and time-consuming task; a systemthat can perform the measurement and analysis in an automated fashion with accuracy and speed is required. How-ever, due to the large number of channels, parasitic capacitance and off-capacitance components of the switching sys-tem become the major factors that decreased the accuracy for the measurement of high impedance microelectrodes.Here we investigated the implementation of automatic impedance measurement system with analyzing the causesof possible measurement-related problems in multichannel switching configuration. Based on our multi-channel mea-surement circuit model, we suggest solutions to the problems and introduce a novel impedance measurement schemeusing electro-mechanical relays. The implemented measurement system could measure |Z| < 700 kΩ of impedancein −10% errors, which can be widely applicable to high density neural recording MEAs.Key words: MEA, electrode impedance, automatic impedance measurement system, multichannel switching, elec-tro-mechanical relay switch

Automatic Switching System for The Impedance Analysis of Multichannel icroelectrode Arrays: Limits and Improvement Scheme