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Damascene             oxalic acid (OA), lactic acid (LA)  citric acid (CA)       .  pH         .      10 wt% CA      pH 2 7       pH 2 4         pH 5 7  10 wt% LA      .   pH      . CA    CA         CA 5 wt%       88 %           .

Characteristics of Semi-Aqueous Cleaning Solution with Carboxylic Acid for the Removal of Copper Oxides Residues