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In this study, a smart isolation platform has been developed for control of microvibration of high-technology facilities, such as semi-conductor plants and TFT-LCD plants. Previously, microvibration control performance of a smart base isolation system has been investigated. This study compared microvibration control performance of a smart isolation platform with that of conventional base isolation and fixed base. For this purpose, train-induced ground acceleration is used for time history analysis. An MR damper was used to compose a smart isolation platform. A fuzzy logic controller was used as a control algorithm and it was optimized by a multi-objective genetic algorithm. Numerical analysis shows that a smart isolation platform can effectively control microvibration of a high-technology facility subjected to train-induced excitation compared with other models.

Application of Smart Isolation Platform for Microvibration Control of High-Tech Industry Facilities