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In this paper we design and implement a new Hybrid Equipment Data Acquisition System (HEDAS) for data collection of semiconductor and optoelectronic manufacturing equipments in the equipment engineering system(EES) framework. The amount of the data collected from equipments have increased rapidly in equipment engineering system. The proposed HEDAS efficiently handles a large amount of real-time equipment data generated from EES framework. It also can support the real-time ESS applications as well as non real-time ESS applications. For the real-time EES applications, it performs high-speed real-time processing that uses continuous query and filtering techniques based on memory buffers. The HEDAS can optionally store non real-time equipment data using a HEDAS-based database or a traditional DBMS-based database. In particular, The proposed HEDAS offers the compression indexing based on the timestamp of data and query processing technique saving the cost of disks storage against extremely increasing equipment data. The HEDAS is efficient system to collect huge real-time and non real-time equipment data and transmit the collected equipment data to several EES applications in EES framework.

Design and Implementation of a Hybrid Equipment Data Acquisition System(HEDAS) for Equipment Engineering System(EES) Framework