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In this paper, the polishing force monitoring and the control method were implemented for the polishing machine with the airbag tool. Airbag tool has been known to be adaptable to the curvature variation such as the aspherical and the free-form surface. However, it was necessary to control the tool movement of vertical axis also because of the table rotational wobble and vibration. To solve it by the polishing force control, we installed another stepping motor to the z-axis. And the polishing force was measured with the load cell and controlled by the PID Labview controller. A few hundreds gram of the polishing force were well controlled under 0.8 second of the response time and 5% variation. An experiment was done to clean the edge burrs of the micro channel structure of width 87㎛ using the polishing force control. Key Words : Polishing(), Polishing force( ), Airbag tool( ), Micro polishing( ), Real time force control(  ) 1.      (spherical)     (aspherical) (free-from surface)

Micro Polishing Force Control of the Polishing Machine with the Airbag Tool