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A MEMS Duffing resonator is driven by two adjacent frequency tones into thenonlinear regime. We show that if the two-tone drive is applied at a frequencywhere a bistable response of the nonlinear oscillator exists, then the systemoutput will be modulated by a relaxation cycle caused by periodically jumpingbetween the two solution-branches of the bistable response. Although the jumpsare caused by the beating of the drives, the existence and period of thisrelaxation or hysteresis cycle is not solely dictated by the beat frequencybetween the two driving tones, but also by their amplitude and detuning withrespect to the device resonance frequency. We equally demonstrate how theperiod of the cycles can be tuned via added tension in the device and how theseoscillations can be used as a means of sensitive pulse-width modulated (PWM)readout of MEMS sensors.

Pulse-width modulated oscillations in a nonlinear resonator under two-tone driving as a means for MEMS sensor readout