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We present a new method for torque magnetometry by using a commerciallyavailable membrane-type surface-stress sensor (MSS). This sensor has a siliconmembrane supported by four beams in which piezoresistive paths are integrated.Although originally developed as a gas sensor, it can be used for torquemeasurement by modifying its on-chip wiring. We demonstrate the magnetic-torquemeasurement of submillimeter-sized crystals at a low temperature and in strongmagnetic fields. This MSS can observe de-Haas-van-Alphen oscillation, whichconfirms that it can be an alternative tool for self-sensitivemicrocantilevers.

New method for torque magnetometry using a commercially available membrane-type surface-stress sensor