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Based on the electromagnetic properties of all-dielectric optical metamaterial, a all-dielectric metasurface structure of lattice-perturbed nanohole arrays is proposed to excite multiple Fano resonances in the near-infrared region. Combined with the group theory, the formation mechanism of multiple Fano resonances in this structure with four mirror symmetry and three of them is destroyed is analyzed in depth. The results show that double degenerate mode directly excited by the normal incident plane wave is coupled to vertical free-space radiation continuum to form double Fano resonance when unit cell is symmetrical, while the uncoupled non-degenerate modes are excited by the normal incident plane wave and then couple to vertical free-space radiation continuum to form triple Fano resonance with a higher factor when the symmetry is broken. Numerical simulation is used to explore the influence of x-polarized and -polarized plane wave on the above Fano resonances. The results show that Fano resonance of double degenerate mode is polarization independent, while the non-degenerate resonance is polarization dependent. This article provides an effective theoretical reference for the design of other two-dimensional lattice array metasurfaces to realize the excitation and evolution of multiple Fano resonances.

Group theory based formation mechanism and evolution of multiple Fano resonances in dielectric nanohole arrays with lattice-perturbed