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In this paper, the local thickness of single crystal Si film samples and the extinction distance ξ 400  of the crystal plane of Si crystal (400) were measured by analyzing the double-beam converging beam diffraction (CBED) pattern of single crystal Si film samples under the 200 kV of accelerated voltage. The factors affecting the measurement uncertainty are analyzed, and the influence coefficients of each factor on the measurement uncertainty are discussed by using the concept of first-order partial derivative. The measurement uncertainty of thin crystal thickness and extinction distance are evaluated and expressed according to national standards GB/T 27418-2017. The conclusions are as follows: The estimated local thickness of the measured Si crystal is 239 nm, the combined standard uncertainty is 5 nm and the relative standard uncertainty is 2.2%. Under the condition of the inclusion probability being 0.95, the coverage factor as 2.07, the expanded uncertainty is 11 nmUnder the experimental condition of 200 kV accelerated voltage, the estimated extinction distance of Si crystal (400) plane is 194 nm, the combined standard uncertainty of the extinction distance is 20 nm, and the relative standard uncertainty of the extinction distance is 10%. Under the condition of inclusion probability being 0.85, the coverage factor as 1.49, the expanded uncertainty is 30 nm. The main factors affecting the combined standard uncertainty of sample thickness  t  0  are camera constant, accelerating voltage and sample thickness, while for the extinction distance, it is camera constant, accelerating voltage and extinction distance. The influence of the uncertainties of the measurement data of the Kossel-Möllenstedt pattern on the uncertainty of the extinction distance is  n  i (ξ/ t ) 3  times that on the sample thickness, and their influence on the slope of the fitting line is about  n i   times that on the intercept of the line, where  n i   is a positive integer and greater than or equal to 1. If the sample is not too thin, that is,  n i   is greater than 1, then the uncertainty of crystal thickness will smaller than the uncertainty of extinction distance.

Evaluation of uncertainty in measuring thin crystal thickness and extinction distance by Kossel-Möllenstedt pattern analysis