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The changes of composition and structure of polyimide films due to high-energy irradiation and high-dose implantation were studied by surface characterization techniques and the electric resistance measurement. Polyimide (C22H10N2O5) n film specimens were irradiated with 4 MeV Ni3+ ions for the fluences from 3.5×1012cm-2 to 1.0×1016cm-2. After irradiation with the fluence of 1.0×1016cm-2, the ratios of N/C and O/C decreased from 0.089 and 0.244 to 0.018 and 0.086, respectively. The generation of amorphous carbon areas dispersed in the irradiated polyimide film was suggested by Raman spectroscopy and electric resistance measurement. Nano-sized metallic particles were produced in the films by 130 keV silver ion implantation. The diameter of the particles was about 5 nm for the specimen implanted with 1×1016cm-2 and it increased with the implantation dose. On the other hand, no particles were observed in the specimen implanted with tungsten ion.

Ion Irradiation Effects on Polymers and Fabrication of Carbon Alloy