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National Institute of Standards and Technology, Gaithersburg, MD 20899-0001 Standard Reference Material 484 is an artifact for calibrating the magnification scale of a Scanning Electron Microscope (SEM) within the range of 1000 X to 20000 X. Seven issues, SRM484, and SRM-484a to SRM-484f, have been certified between 1977 and 1992. This publication documents the instrumentation, measurement procedures and determination of uncertainty for SRM-484 and illustrates with data from issues 484e and 484f.

The measurement and uncertainty of a calibration standard for the scanning electron microscope