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Silicon derived polymers containing nitrogen, carbon and boron have been considered as precursors for various non-oxide ceramics such as SiC, SiCN and SiBCN (Madou, 2002, Nguyen & Wereley, 2002, Liew et al., 2003). These ceramics can be easily shaped using various forming processes and then crosslinked by exposure to heat or UV radiation to form an infusible solid. The consolidated preceramic polymers are finally pyrolyzed at high temperatures to transform into the dense ceramic phases. These materials can be used for high temperature applications in areas such as structural composites (Kim et al., 1996), electronic devices (Xia & Whitesides, 1998) and catalytic chemical reactions (Xia et al., 1999). Table 1 shows some selected important preceramic polymers that have been studied in various aspects. In particular, silicon carbide (SiC) is a typical non-oxide ceramic that has attracted the most interest on account of its unique physical and chemical properties such as high thermal conductivity, excellent thermal stability, superior stability towards oxidation compared with carbon, high mechanical strength and chemical inertness. Commercially available polysilazane (VL-20, KiON Corp. USA) and two types of polycarbosilanes, Polymethylsilane (PMS) and Allyhydridopolycarbosilane (Starfire System, USA) are readily used as preceramic polymers for SiCN and SiC ceramics, respectively.

Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques