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Metal-doped zinc oxide (ZnO) nanorod arrays have attracted much attention due to improvement in their electrical, structural, and optical properties upon doping. In this chapter, we discuss the effects of aluminum (Al)and iron (Fe)-doping on ZnO nanorod arrays properties particularly for humidity sensor applications. Compared to Fe, Al shows more promising characteristics as doping element for ZnO nanorod arrays. The Al-doped ZnO nanorod arrays showed dense arrays, small nanorods diameter, and high porous surface. The I-V characteristics showed that Al-doped sample possesses higher conductivity. From the humidity sensing performance of the samples, Al-doped ZnO nanorod arrays possess the superior sensitivity, more than two times higher than that of the undoped ZnO nanorod arrays sample, demonstrating great potential of Al-doped ZnO nanorod arrays in humidity sensor applications.

Aluminum- and Iron-Doped Zinc Oxide Nanorod Arrays for Humidity Sensor Applications