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The glancing angle deposition (GLAD) method in physical vapor deposition is proved to be a versatile tool to fabricate nanostructured TiO2 as the photocatalyst on specific substrates to form self-standing structures, which are much easier to be recycled. And novel designs of doping, decorating photocatalytic active substance, are brought in to make TiO2 respond to visible light. In this chapter, we introduce our previous works such as TiO2 nanorods with CdS quantum dots, noble metallic nanoparticles, coating TiO2 via atomic layer deposition (ALD), and so on.

Enhanced Visible Light Photocatalytic Performance by Nanostructured Semiconductors with Glancing Angle Deposition Method