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The area of physical quantity processing in recent sensoric applications demands for high accuracy, low distortion, fast response and low power consumption. There are many physical quantities, which could be processed, mainly pressure, temperature, humidity etc. The pressure processing is one of the most important issues for designers. There exist many problems, which have to be solved i.e. how to measure relative and absolute pressure, how to process signal from sensor with low amplitude, how to withdraw noise and parasitics and so on. The pressure is usually measured using capacitive principle (Lee & Wise., 1982), (Chavan & Wise, 2001), (He et al., 2007). The capacitor is formed by measuring membrane and substrate, see Fig. 1. When the pressure is applied, the membrane is deformed and the distance between membrane and substrate changes. It causes the change of capacity, which is processed in next stages.

New Trends in Evaluation of the Sensors Output