English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

Nanofabrication technology is an important field of research, and numerous attempts have been made to improve this technology in recent years. This technology is demanded in various industrial fields such as electronic, photonic, and biomedical engineering to miniaturize machine components. Through miniaturization, the integration and parallelization of compo‐ nents in a machine device are possible, leading to reductions in dead space and fabrication cost. A high-performance device can be fabricated using the changes in physicochemical behavior due to scaling effects; the resonance frequency, thermal response, and chemical reaction all increase with miniaturization. These characteristics are particularly effective in devices such as sensors and reactors. Additionally, Newton’s laws of motion do not hold for distances less than 10 nm owing to increased quantum mechanical effects, so that certain types of functions only occur in miniaturized devices. Devices that maximize these effects include microelectromechanical systems and nanoelectromechanical systems, which consist of micro/ nanometer-scale mechanical components integrated on a silicon surface.

Three-Dimensional Lithography Using Combination of Nanoscale Processing and Wet Chemical Etching