English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Plus monthly

Global: Zendy Tools annual

Global: Zendy Tools monthly

Global: Zendy Free Plan

In the last decade, there has been a tremendous development in the field of miniaturization of chemical and biochemical sensor devices. Microelectromechanical systems (MEMS) refer to microscopic devices that have a characteristic length of less than 1 mm but more than 100 nm and combine electrical and mechanical components. Nanoelectromechanical systems (NEMS) refer to nanoscopic devices that have a characteristic length of less than 100 nm and combine electrical and mechanical components. In mesoscale devices, if the functional com‐ ponents are on microor nanoscale, they may be referred to as MEMS or NEMS, respective‐ ly. These are referred to as an intelligent miniaturized system comprising sensing, processing, and/or actuating functions and combine electrical and mechanical components. The acronym MEMS originated in the USA. The term commonly used in Europe is micro system technology (MST) and in Japan, the term is micromachines. Another term generally used is micro/nanodevices.

Silicon Carbide: A Biocompatible Semiconductor Used in Advanced Biosensors and BioMEMS/NEMS