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Recent years have seen the rapid increase in the demand for microscale components smaller than 100μm in diameter, such as micro machine parts, micromachining tools, micro pin gauges, medical catheters, and probes used in scanning tunneling microscope (STM) and semiconductor inspection. To meet this demand, many researchers have actively engaged in the development of new technology for fabricating such devices precisely and efficiently by non-traditional or mechanical machining methods.

Fabrication of Microscale Tungsten Carbide Workpiece by New Centerless Grinding Method