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have many advantage properties at very high microwave frequency, such as extremely low dielectric loss and near zero temperature coefficient of resonance frequency with low cost (Xu et al., 2006; Yu et al., 2006; Ianculescu et al., 2007; Huang et al., 2006; Varma et al., 2006). Due to these properties, BSZN has several potential applications in the fields of satellite communication and radar and mobile communication systems. As promising materials used in microelectronic and microwave integration circuit, microwave dielectric ceramic thin films will attract great attention in the near future (Huang et al., 2006).

Preparation and Characterization of Dielectric Thin Films by RF Magnetron-Sputtering with (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 Ceramic Target