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In this study, three subjects were investigated for a new biocompatible piezoelectric material generation: 1. Development of a numerical analysis scheme of a three-scale structure analysis and a process crystallographic simulation. 2. Design of new biocompatible piezoelectric materials. 3. Generation of MgSiO3 thin film by using radio-frequency (RF) magnetron sputtering system. Until now, lead zirconate titanate (Pb(Zr,Ti)O3: PZT) has been used widely for sensors (Hindrichsena et al., 2010), actuators (Koh et al., 2010), memory devices (Zhang et al., 2009) and micro electro mechanical systems (MEMS) (Ma et al., 2010), because of its high piezoelectric and dielectric properties. The piezoelectric thin film with aligned crystallographic orientation shows the highest piezoelectric property than any polycrystalline materials with random orientations. Sputtering (Bose et al., 2010), chemical or physical vapor deposition (CVD or PVD) (Tohma et al., 2002), pulsed laser deposition (PLD) (Kim et al., 2006) and molecular beam epitaxy (MBE) (Avrutin et al., 2009) are commonly used to generate high performance piezoelectric thin films. Lattice parameters and crystallographic orientations of epitaxially grown thin films on various substrates can be controlled by these procedures. K. Nishida et al. (Nishida et al., 2005) generated [001] and [100]-orientated PZT thin films on MgO(001) substrate by using CVD method. They succeeded to obtain a huge strain caused by the two effect: the synergetic effect of [001] orientation with the piezoelectric strain; and the strain effect of [100] orientation caused by switching under conditions of the external electric field. Additionally, PZT-based piezoelectric materials, such as Pb(Zn1/3Nb2/3)O3-PbTiO3 (Geetika & Umarji, 2010) and PbMg1/3Nb2/3O3-PbTiO3 (Kim et al., 2010), have also been developed. However, lead, which is a component of PZT-based piezoelectric material, is the toxic material. The usage of lead and toxic materials is prohibited by the waste electrical and electronic equipment (WEEE) and the restriction on hazardous substances (RoHS). For alternative piezoelectric materials of the PZT, lead-free piezoelectric materials have been studied. J. Zhu et al. (Zhu et al., 2006) generated [111]-orientated BaTiO3 on LaNiO3(111) substrate, which had a crystallographic orientation with maximum piezoelectric strain

Three-Scale Structure Analysis Code and Thin Film Generation of a New Biocompatible Piezoelectric Material MgSiO3