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T. S. Santra1, T. K. Bhattacharyya2, P. Patel3, F. G. Tseng1 and T. K. Barik4 1Institute of Nanoengineering and Microsystems (NEMS), National Tsing Hua University, Hsinchu, Taiwan 2Department of Electronics and Electrical Communication Engineering, Indian Institute of Technology, Kharagpur, West Bengal, 3Department of Electrical and Computer Engineering, University of Illinois at Urbana Champaign, 4School of Applied Sciences and Humanities, Haldia Institute of Technology, Haldia, Purba Medinipur, West Bengal, 1Republic of China 2,4India 3USA

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications