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Elemental chemical identification of a specimen and its quantification is fundamental to obtain information in the characterization of the materials (Angeles et al., 2000; CortesJacome et al., 2005). Energy dispersive X-ray spectroscopy (EDXS) is the technique that allows obtaining information concerning the elemental chemical composition using the EDX spectrometer. Generally is attached to a scanning electron microscope (SEM) (Goldstein & Newbury, 2003) and/or in a transmission electron microscope (Williams & Barry-Carter, 1996). The technique is very versatile because the spectrometer gives results in few minutes. The instrument is compact, stable, robust and easy to use and its results can be quickly interpreted. The analysis is based in the detection of the characteristic X-rays produced by the electron beam-specimen interaction. The information can be collected in very specific local points or on the whole sample. So, both electron microscopy and EDXS, give valuable information about the morphology and chemical composition of the sample. In order to give an accurate interpretation of the data collected by the instrument is important to know the fundaments of the technique. The characteristic X-rays are produced by the atoms of the sample in a process called inner-shell ionization (Jenkins & De Dries, 1967). This process is carried out when an electron of inner-shell is removed by an electron of the beam generating a vacancy in the shell. At this moment the atom remain ionized during 10-14 second and then an electron of outer-shell fills the vacancy of the inner-shell. During this transition a photon is emitted with a characteristic energy of the chemical element and its shell ionized. The emitted photons are named by the shell-ionized type as K, L, M lines.... and ┙, ┚, ┛... by the outer-shell corresponding to the electron that filled the inner-shell-ionized. For atoms with high atomic numbers, is important to note that some transitions are forbidden. Permissible transitions can be followed by the quantum selection rules and the notation can be followed by Manne Siegbahn and/or, IUPAC rules (Herglof & Birks, 1978). During the beam-sample interaction, another X-ray source is produced and it is known as Bremsstrahlung radiation or continuum X-rays which are generated for the deceleration of the electron beam in the Coulombic field of the specimen atoms. When the electrons are braked, they emit photons with any energy value giving rise to a continuous electromagnetic spectrum appearing in the EDX spectrum as

Chemical Quantification of Mo-S, W-Si and Ti-V by Energy Dispersive X-Ray Spectroscopy