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This chapter explores signal analysis of a circuit embedded in an LSI to probe the voltage fluctuation conditions, and is described as an example of digital signal processing1. As process scaling has continued steadily, the number of devices on a chip continues to grow according to Moore’s Law and, subsequently, highly integrated LSIs such as multi-CPU-core processors and system-level integrated Systems-on-a-Chip (SoCs) have become available. This technology trend can also be applied to low-cost and low-power LSIs designed especially for mobile use. However, it is not the increase in device count alone that is making chip design difficult. Rather, it is the fact that parasitic effects of interconnects such as interconnect resistance now dominate the performance of the chip. Figure 1 shows the trends in sheet resistance and estimated power density of LSIs. These effects have greatly increased the design complexity and made power-distribution design a considerable challenge.

In-Situ Supply-Noise Measurement in LSIs with Millivolt Accuracy and Nanosecond-Order Time Resolution