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With only 3 % of N and 9 % of In, InGaAsN with a band gap of 1.04 eV was obtained and could be lattice matched to GaAs and Ge. This dilute nitride semiconductor has been selected as a promising candidate for high efficiency multijunction tandem solar cells (Geisz and Friedman, 2002). However, the diffusion length of minority carriers and the mobility are still lower than of that in GaAs or InGaAs and showed a considerable degradation with increasing the N concentration. These electrical properties are insufficient to insure the current matching in the multijunction solar cell structure AlInGaP/GaAs/InGaAsN/Ge (Friedman et al., 1998). An obvious reason of such degradation is the high density of Nrelated lattice defects that can be formed during growth to compensate for the tensile strain caused by the small atomic size of N compared with that of arsenic (As) and to the large miscibility of the gap between GaAs and GaN. These defect centers are expected to act as active recombination and/or scattering centers in the forbidden gap of the alloy (Zhang & Wei, 2001). However, no experimental evidence has yet been reported. On the other hand, the conductivity of undoped p-type InGaAsN or GaAsN and their high background doping (Friedman et al., 1998; Kurtz et al., 1999; Moto et al., 2000; Krispin et al., 2000) prevent the design of wide depletion region single junction solar cell and the fabrication of intrinsic layer to overcome the short minority carrier lifetime. This serious problem was expected in the first stage to the density of unintentional carbon in the film (Friedman et al., 1998; Kurtz et al., 1999; Moto et al., 2000). However, the carrier density in some InGaAsN semiconductors was found to be higher than that of carbon (Kurtz et al., 2002). Furthermore, the high density of hydrogen (up to 1020 cm−3) and the strong interaction between N and H in InGaAsN to form N-H related complex were confirmed to be the main cause of high background doping in InGaAsN films (Li et al., 1999; Janotti et al., 2002, 2003; Kurtz et al., 2001, 2003; Nishimura et al., 2007). In addition, N-H complex was found theoretically to bind strongly to gallium vacancies (VGa) to form N-H-VGa with a formation energy of 2 eV less than that of isolated VGa (Janotti et al., 2003). These predictions were supported experimentally using positron annihilation spectroscopy results (Toivonen et al., 2003).

Investigation of Lattice Defects in GaAsN Grown by Chemical Beam Epitaxy Using Deep Level Transient Spectroscopy