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The recent growth in the wireless communications area has incurred a large demand for high data rates, broad bandwidth, reliable, and low cost RF tunable microwave devices. Traditional materials, both ferrites and semiconductors, have been exploited for these devices. Unfortunately, semiconductor devices are expensive and have high losses at microwave frequencies while ferrites are not frequency agile and offer slow tuning speeds. Such performance drawbacks have cultivated strong interest in developing new materials, namely perovskite oxide thin films. Recently, barium strontium titanate, BaxSr1-xTiO3 (BST), a perovskite oxide solidsolution, has captured the attention of microwave engineers as a candidate material to promote a new generation of passive tunable microwave devices. The intense interest in BST thin films is largely due to the fact that these materials possess the ability to change their dielectric constants as well as their dielectric loss in response to an externally applied field. This feature makes BST thin films ideally suited for electronically tunable microwave devices such as resonators, filters, oscillators and phase shifters (Kalkur et al., 2009). Furthermore BST thin films have several major advantages compared to their conventional ferrite and semiconductor counterparts; they offer fast tuning speeds, low power consumption, and low cost due to affordable fabrication and process science methodologies. Additionally, for microwave applications, the development and implementation of BST materials in thin film form is critical for enabling miniaturization of microwave components and promoting integration with semiconductor microelectronic circuits. Finally, enhanced material performance in concert with scale-up, affordability, integration, and small size are critical metrics for communications systems whether it be a planar phased array antenna system or hand held devices incorporating tunable circuits. Over the last decade, the growth and process science of uniform composition BST have been investigated intensively for tunable device applications (Weiss et al., 2008, Podpirka et al., 2008); Joshi & Cole, 2000). To achieve optimum device performance, it is critical to fabricate

Performance Enhanced Complex Oxide Thin Films for Temperature Stable Tunable Device Applications: A Materials Design and Process Science Prospective