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Vacuum chamber or vacuum tube for the exhaust process of vacuum glazing is presently used, where excessive time and expenses are required to make the whole vacuum chamber or tube vacuum. To solve this problem, multifunction equipment for vacuum exhaust and ultrasonic joining at atmospheric pressure has been developed, in which a piezoelectric vibrator experiences excessive temperature rise resulting in optimizing the cooling of the equipment. Therefore, in this study, cooling effects of natural convection and forced convection methods were identified by numerical analysis and experiments, and cooling performance of the multifunction equipment was optimized.

A Study on Cooling of Piezoelectric Element of Multifunction Equipment for Vacuum Exhaust and Ultrasonic Joining