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The importance of improving semiconductor fab layout has been increased with the necessity of a large-scale capital investment and the increase of manufacturing complexity of the system. For the present, most semiconductor fab takes the form of a bay type layout where the same types of machines has been laid at the same bay. The bay type layout has many disadvantages in respect of material flow control even though it has merits of flexibility. To overcome the drawbacks of the bay type layout, a new room type semiconductor layout which integrates bays without a center spine and maintains the flexibilities of the bay type has been presented and compared with existing layouts. The results of test show that the room type layout is superior to the existing layouts from standpoints of transportation number and time, foot-print, number of stocker being passed and material flow time.

A Layout Comparison Study for Improving Semiconductor Fab System