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Automatic semiconductor manufacturing systems are demanded to improve the efficiency of the semiconductor production process. These systems include the functionalities such as the analysis and management schemes for very large real-time data in order to enhance the productivities. So, it requires the efficient storage management system to store very large real-time data. Traditional database management systems(e.g. Oracle, MY-SQL, MS-SQL) are based on disk. However, previous DBMS`s have the limitation on the low storing performance. In this paper, we propose a compress-merge storing method of very large real-time data using insert transaction of a block unit. The proposed method shows better processing performances compare to conventional DBMS`s. Also compress-merge method makes it possible that it can store large real-time data on low storage cost. Therefore, the proposed method can be applied to an efficient storage management system in the semiconductor production process.

An Efficient Storing Scheme of Real-time Large Data to improve Semiconductor Process Productivities