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To control the diameter size of the carbon nanofilaments (CNFs), SF? was incorporated in the source gases (C₂H₂/H₂) during the initial deposition stage. The source gases and SF? were manipulated as the cyclic on/off modulation of C₂H₂/H₂/SF? flow in a thermal chemical vapor deposition system. The characteristics of the CNFs formation on the substrate were investigated according to the different cyclic modulation processes and the substrate temperatures. By SF? + H₂ flow injection during the cycling etching interval time, the diameter size of CNFs was extremely decreased. The cause for the decrease in the diameter size of the individual CNFs by the cyclic on/off modulation process of C₂H₂/H₂/SF? flow was discussed in association with the slightly enhanced etching ability by the incorporation of SF?.

applied science and convergence technology/han'gug jin'gong hag'hoeji

Controlling the Diameter Size of Carbon Nanofilaments by the Cyclic on/off Modulation of C2H2/H2/SF6Flow in a Thermal Chemical Vapor Deposition System