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A resin-made-bellows pump is used practically as a chemical pump application. Its discharge pressure is low as 0.1MPa in general; therefore, its applicable fields are limited. In order to make the pressure higher, we developed a metal bellows pump driven by an electromagnetic reciprocating actuator for various industrial applications with the pressure of over 10MPa and non-leakage performance. As the pressure becomes higher, larger output force is required to the actuator. The developed electromagnetic actuator can drive the bellows by reciprocating motion in the stroke of 1mm with the maximum output force of 1400N. However, the high-speed motion of the actuator by the armature positionand velocity-sensorless control makes issue that the armature collides hard with the stator and generates the noise and vibration. In this paper, the motion control method to reduce the mechanical collision in the actuator without positionand velocity-sensors is presented.

MOTION CONTROL OF ELECTROMAGNETIC RECIPROCATING ACTUATOR FOR METAL BELLOWS PUMP