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Iridium oxide is an anodic electrochromic material, which takes on a blue-black color through electrochemical oxidation and turns to transparent via reduction. Hydrated amorphous Ir oxide thin films with various thicknesses from 20 to 400 nm were prepared by reactive sputtering in a H 2 O atmosphere, and their transmittance spectra in both the bleached and colored states as well as their response times were examined in this study. The bleached and colored transmittances decreased with increasing film thickness according to Lambert’s law, and the absorption coefficients in the bleached and colored states were estimated to be 3.2 ´ 10 3 and 1.1 ´ 10 5 cm -1 , respectively, at a wavelength of 600 nm. The results point to almost all the Ir atoms being electrochemically active and contributing to the color change. A maximum transmittance change of 81% was obtained for the 400 nm-thick film. Further, there was a trade-off between the response speed and the transmittance change. The response speed slowed down with increasing the film thickness, while the coloring and bleaching response time for the thick films was several tens of seconds.

Electrochromic Properties of Sputtered Iridium Oxide Thin Films with Various Film Thicknesses