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A particulate matter sensor fabricated by MEMS process is proposed. It is developed to accommodate Euro6 on-board diagnostics regulation for diesel automobile. In the regulation, emission of diesel particulate matter is restricted to 9 mg/km. Particulate matter sensor is designed to use induced charges by charged particulate matter. To increase sensitivity of the sensor, groove is formed on sensor surface because wider surface area generates more induced charges. Sensitivity of the sensor is measured 10.6 mV/(mg/km) and the sensor shows good linearity up to 15.7 mg/km. Also its minimum detectable range is about 0.25 mg/km. It is suitable to detect failure of a diesel particulate filter which should filter particulate matter more than 9 mg/km. For removing accumulated particulate matter on the sensor which can disturb normal operation, platinum heater is designed on the backside of the sensor. The developed sensor can sense very low amount of particulate matter from exhaust gas in real-time with good linearity.

A Particulate Matter Sensor with Groove Electrode for Real-Time Diesel Engine On-Board Diagnostics