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Sol–gel derived silica membranes are reviewed in terms of control of silica network size and hydrothermal stability, which are most important issues for a practical application of amorphous silica membranes in industry. For control of silica network size, organic-template and spacer methods are introduced. Bridged alkoxides with organic groups between 2 Si atoms can be used for control of silica network size by both template and spacer method, for example, BTESE–derived silica membranes showed quite high hydrogen permeance with high H2 to SF6 permeance ratio of 1,000 due to loose organic-inorganic silica networks by Si–C–C–Si unit. For hydrothermal stability of amorphous silica membranes at high temperatures, metal–doped silica membranes are introduced, especially Ni– and Co–doped silica membranes with superior hydrothermal stability and hydrogen permeation performance. Finally, recent progresses in metal–doped silica membranes such as Nb–SiO2 and Pd–SiO2 are also summarized.

Sol-Gel derived Silica Membranes: Control of Silica Network Size and Hydrothermal Stability