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Multiand hyperspectral measurement methods are a versatile approach to analyzing and understanding material properties. Especially imaging techniques allow for a precise sensing of surface properties. This paper presents a novel and multi-purpose metrology platform for high-resolution spectral measurements. The system is able to acquire multispectral images with six different spectral channels as well as hyperspectral point measurements and images. This is realized with a combined measurement head that includes a gray value camera as well as two spectrometers ranging from 190nm to 1,700nm. A three axis Cartesian robot with nanometer-precision allows the analysis of large samples with a size up to 40 × 10 × 10 cm and a weight of up to 25kg. Approaches to automatically focus both the camera and the spectrometers are presented. The calibration process between the camera and the spectrometers, which is necessary to acquire the full spectral information corresponding to each pixel of the camera image, is described. Example images and measurements are discussed to show the potential of the metrology platform.

Combined High-Resolution Imaging and Spectroscopy System - A Versatile and Multi-modal Metrology Platform