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The diffusion furnace is an important and indispensable equipment in the production process of solar cellï¼it plays a crucial role in the photoelectric conversion efficiency of the solar cell. Production efficiency and temperature control precision of traditional closed diffusion furnace is low. To solve this problemï¼this paper presents a temperature control system of continuous diffusion furnace. The system uses PID cascade control algorithm based on Smith estimating pre-compensation to achieve the temperature control of furnace and ensure the uniformity and stability of the temperature, so as to ensure the uniformity of the dopant diffusion. The simulation results verify the effectiveness of the control algorithm; and practical experiments prove the feasibility of the temperature control system.

The Temperature Control System of Continuous Diffusion Furnace