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. Nano-positioning is widely used in Micro-electromechanical Systems (MEMS),micromanipulator and biomedicine, coupling errors and tiny outputdisplacements are the main disadvantages of the one. A totally uncoupledmicro/nano-positioning stage with lever amplifiers is designed and tested inthis paper. It is fully symmetrical along with the x - and y -directions.For obtaining large output displacements, two fully symmetric two-stage leverdisplacement amplifiers are utilized to amplify output displacements ofpiezoelectric actuators (PZTs). The established models for performancesevaluation of the stage, in terms of kinetostatics, amplification ratio,reachable workspace, the input and output stiffness, are verified by finiteelement analysis (FEA). After that, the dimensional optimization is alsocarried out through the genetic optimization algorithm.The prototype of themechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM)process. Testing results indicate that the proposed micromanipulatordemonstrates good performance.

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation