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. For detection of benzene, a gas sensor system with metal oxidesemiconductor (MOS) gas sensors using temperature-cycled operation (TCO) ispresented. The system has been tested in two different laboratories at theconcentration range from 0.5 up to 10 ppb. The system is equipped with threegas sensors and advanced temperature control and read-out electronics for theextraction of features from the TCO signals. A sensor model is used todescribe the sensor response in dependence on the gas concentration. It isbased on a linear differential surface reduction (DSR) at a low temperaturephase, which is linked to an exponential growth of the sensor conductance. Tocompensate for cross interference to other gases, the DSR is measured atthree different temperatures (200, 250, 300  ∘ C) and the calculatedfeatures are put into a multilinear regression (partial least squareregression – PLSR) for the quantification of benzene at both laboratories.In the tests with the first set-up, benzene was supplied in defined gasprofiles in a continuous gas flow with variation of humidity and variousinterferents, e.g. toluene and carbon monoxide (CO). Depending on the gasbackground and interferents, the quantification accuracy is between ± 0.2and ± 2 ppb. The second gas mixing system is based on a circulation ofthe carrier gas stream in a closed-loop control for the benzene concentrationand other test gases based on continuously available reference measurementsfor benzene and other organic and inorganic compounds. In this system, asimilar accuracy was achieved for low background contaminations and constanthumidity; the benzene level could be quantified with an error of less than0.5 ppb. The transfer of regression models for one laboratory to the otherhas been tested successfully.

Highly sensitive benzene detection with metal oxide semiconductor gas sensors – an inter-laboratory comparison