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Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to makethese devices available on the market is to develop an appropriate housingconcept. A concept based on low-temperature cofired ceramics (LTCC) has beeninvestigated and tested under elevated temperatures up to 600 °C.The devices showed promising results up to 450 °C. Thoroughanalysis of the possible failure mechanisms was done to increase the maximumtemperature above this limit in further production cycles

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors