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Measurement tasks of modern micro- and nanometrology are posing a problemfor current measurement instruments with decreasing structure sizes andrising aspect ratios. There is an open requirement for nanometre-resolving 3-Dcapable sensors and corresponding 3-D positioning systems to operate thesensors for 3-D measurements. A 3-D probing system based on electricalinteraction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-Dmeasurements with the nanopositioning and nanomeasurement machine NMM-1 andalso with the application of a rotary kinematic chain. In addition new 3-Dmeasurement routines for the NMM-1, also for micro-tactile probing systemsas well as current plans, are shown

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing