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In this paper, a contactless measuring system for the determination of the S-parameters of planar circuits is presented. With a contactless measuring system it is possible to characterise a device-under-test (DUT) embedded in a planar circuit environment without cutting the planar transmission lines connecting the DUT. The technique utilizes four identical capacitive probes in conjunction with a vector network analyser (VNA). For the usage of electromagnetic probes compared to other coupling techniques like the electro-optic probing, there is no need for expensive and complex equipment in addition to the typical equipment of a common microwave laboratory. The S-parameters are determined accurately using conventional calibration methods. A simple analytical model for the representation of the basic characteristics is developed. Furthermore, the influences on the S-parameters as a result of a variation in the coupling are presented. With the knowledge of the system characteristics, an accurate contactless measurement system is set up. The comparison between conventional and contactless measurements in a frequency range of 1-20 GHz shows a very good agreement with a phase error smaller than 1°

Contactless electromagnetic measuring system using conventional calibration algorithms to determine scattering parameters