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The presented research is focused on the adaption of the Electronic Speckle Pattern Interferometry for the analytical examination of displacements on so called MEMS. For doing so, a completely new experimental setup has been designed fitting the requirements of the optical measurement technique as well as the analyzed microsystems. Furthermore, it also has been possible to analyze the displacement of selected microsystems and consequently verifying this proof-of-concept.

P1.4 - A novel ESPI system for the analysis of static and oscillating displacements of microsystems